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https://www.ies.umontpellier.fr/wp-content/uploads/2022/06/M2N-Equipement_de_depot_par_pulverisation_cathodique_ZrO2Y203LaTiO3RuO2NiCrAlCr-3-scaled.jpg25601707Matériaux, Micro et Nanodispositifs Summary The Micro and Nano Systems research axis focuses on the study and integration of materials and microtechnologies for the realization of sensors and devices exploiting physical phenomena related in particular to piezoelectricity, optics and heat. In general, the path followed by this axis consists in conducting fundamental and applied research […]