Benoît CHARLOT / Research / Micro Power Generators

Micro Power Generators for vibration energy harvesting

The goal of this research project is to build an autonomous microsystem that includes a micro power generator that scavenges vibration from its environment and converts it into electrical power. The system includes a piezoelectric MEMS vibration transducer and dedicated analog ICs for the conversion of the generator power into stable DC current. This project has been supported by an European research project : VIBES from the FP6.

SOI AlN Micropower generator node

Poster presented at PowerMEMS'05 (PDF)

Related publications :

  • M.Marzencki, S.Basrour, B.Charlot, S.Spirkovich, M.Colin, "A MEMS Piezoelectric Vibration Energy Harvesting Device", in PowerMEMS 05, Nov 28-30, Tokyo, Japan.
  • Y.Ammar, A.Buhrig, M.Marzencki, B.Charlot, S.Basrour, K.Matou and M.Renaudin, "Wireless sensor network node with asynchronous architecture and vibration harvesting micro power generator", in SoC-EUSAI, Smart Objects & Ambient Intelligence, October 12th - 14th 2005, Grenoble, France.
  • M.Marzencki, S.Basrour, B.Charlot, M.Colin, L.Valbin, "Design and fabrication of piezoelectric micro power generators for autonomous microsystems", Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP?05, 01-03 June 2005, Montreux, Switzerland.
  • G.Despesse, T.Jager, J.J.Chaillout, J.M.leger, A.Vassilev, S.Basrour and B.Charlot, "Fabrication and characterization of high damping electrostatic micro devices for vibration energy scavenging", Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP'05, 01-03 June 2005, Montreux, Switzerland.
  • M.Marzencki, S.Basrour and B.Charlot, "Design, modelling and optimisation of integrated piezoelectric micro power generator", Modeling and Simulation of MEMS, MSM'05, Anaheim, California, USA, 8-12 Mai 2005.